摘要
为控制FTIR光谱仪中迈克尔逊干涉仪的动镜做一维的精密直线运动,研究了一种低耦合位移的动镜支撑机构。利用单平行和双平行四杆机构的优点,基于柔性铰链设计了一种动镜支撑机构。根据材料力学及机构动力学理论,对基于压电陶瓷(PZT)驱动器驱动的动镜支撑机构系统的静、动态性能进行了分析。仿真结果表明,低耦合位移动镜支撑机构在外力对称作用时无垂直耦合位移,在外力偏移1 mm非对称作用时其耦合转角的数量级(以度为单位)为10-6;在输出相同位移时,动镜机构的最大应力约为双平行四杆机构的0.5倍;动镜机构的基频f为211.3 Hz,PZT驱动器和动镜机构构成的机电系统的固有频率fn为823.7 Hz,fn约为f的4倍,满足动镜支撑机构系统的动态性能要求。该研究为后续的进一步研究打下了基础,具有一定的工程价值及理论指导意义。
A kind of moving reflector＇s mechanism with small coupling displacement was studied to control the reflector＇s movement of Michelson interferometer in F＇FIR spectrometer. On the basis of a single and double parallel four-bars mechanisms, the moving reflector＇s mechanism was created by employing flexure hinges. And the static and dynamic characteristics of the mechanism system driven by piezoelectric ceramic （PZT） actuator were analyzed. The results reveal that there is no coupling displacement produced with the mechanism when force is symmetrical, while the coupling angle of the mechanism is small to 10^（in degrees） when force is unsymmetrical, and that the maximum stress of the mechanism is about 0.5 times lower than that of double parallel four-bars mechanism at the same output displacement. Moreover, the natural frequency fn, of the electromechanical system composed of PZT actuator and the mechanism is 4 times higher than the fundamental frequency f of the mechanism, whichmeets the requirement of dynamic performance. The study will provide a basis and some valuable theoretical guidance for future research.
出处
《红外与激光工程》
EI
CSCD
北大核心
2013年第4期975-981,共7页
Infrared and Laser Engineering
基金
中国科学院知识创新工程国防科技创新重要方向项目(YYYJ-1122)
中国科学院长春光学精密机械与物理研究所三期创新工程资助项目
