某单晶硅生产企业职业危害及防护调查

Survey on Occupational Hazards and Preventive Measures in a Monocrystalline Silicon Manufacturer

[目的]分析单晶硅生产企业工艺特点和职业病危害关键控制点,提出相应的防护对策。[方法]以浙江省某单晶硅生产企业为研究对象,分析其工艺特点,掌握可能接触职业危害的作业点,对现场开展职业卫生学调查,并对职业危害因素水平进行检测,依据国家职业卫生标准进行评判。[结果]该单晶硅生产企业化学品清洗、拉晶、单晶硅棒及单晶硅片加工、废水及废气处理等生产工段是职业危害控制的关键点。在采取相应的防毒防尘等防护措施条件下,危害岗位的职业病危害浓度及强度均能得到有效控制。但发现企业内超声水洗岗位未采取局部通风措施,酸液配制未单独设间,化学品库无事故通风、冲洗和排水设施。企业的应急救援设施有待进一步完善,没有组织员工进行相应的职业健康检查,未建立职业健康监护档案。[结论]单晶硅生产企业要重视氢氟酸的储存、酸(碱)液配制和使用岗位、超声水洗等岗位的职业危害控制,以有效预防化学性皮肤灼伤和急性化学物中毒的发生。要加强职业卫生管理,特别应健全突发事件的应急预案,完善应急设施,提高员工的应急反应和处置能力。

[ Objective ] To study the technical characteristics and the critical control points of occupational hazards in a monocrystalline silicon manufacturer and to propose corresponding control measures. [ Methods ] A field investigation on occupational health was conducted to understand technical characteristics and to detect possible workplaces with exposure to occupational hazards in accordance with relevant standards. [ Results ] Chemical cleaning, crystal pulling, processing of silicon rods ＆ chips, and waste water ＆ gas treatment were the critical points in occupational hazards control. The concentration or intensity of occupational hazards could be effectively controlled after relevant protective measures against industrial toxicants and dust were adopted. However, in the surveyed manufacturer, lacks of local ventilation for ultrasonic washing units, separate rooms for acid preparation, and emergency ventilation, irrigation, and drainage facilities for chemical storage were identified. The emergency first aid equipments needed to be further improved. Furthermore, the enterprise had not arranged occupational health checks nor established occupational health records for their workers. [ Conclusion ~ Employers should pay attention to occupational hazards control in the locations of hydrofluoric acid storage, acid and alkali preparation and utilization, and ultrasonic washing, so as to prevent potential incidences of chemical skin burns and acute chemical poisonings. It is required to strengthen enterprises＇ management of occupational hazards, especially emergency reaction plans and related facilities, and to improve employees＇ emergency response capabilities.