片状脆性材料拾放机械手控制系统设计与实现

Design and implementation of the control system of multi-DOF manipulator used for picking-up and placing the flaky brittle materials

针对质子交换膜燃料电池(PEMFC)膜电极的制备,提出一种用于拾放片状脆性材料的五自由度机械手,并重点研究其控制系统的设计与实现。为满足膜电极制造工艺中提出的精确力/位控制、精确对位和快速拾放的控制要求,提出基于运动模式切换和力/位双闭环控制策略,基于视觉对准的视觉纠姿系统和基于速度、加速度前馈的位置控制方法。这些控制策略和方法已成功运用于片状脆性材料拾放机械手的控制系统中,控制效果良好,亦可推广到集成电路(IC)制造装备等其他领域。

For making membrane electrode of proton exchange membrane fuel cell, proposes a kind of 5-DOF manipulator used for picking-up and placing the flaky brittle materials, focusing on studying design and implementation of its control system. To meet control requirements of precise force/position control, high-precision alignment control ,fast pick＆place raised by manufacturing process of membrane electrode, proposes force/position hybrid control strategy and control method based on switching motion mode and force close loop, posture-adjusted system based on the machine vision system and position control method based on the feed-forward control of speed and acceleration. Those control strategies and methods have been successfully used in the multi-DOF manipulator, obtained good control effect and can be promoted to other areas, such as the IC manufacturing equipment.