标准环规溯源问题探讨

Discussion on Trace of Standard Ring Gauge

提出一种新的标准环规溯源方法。用 63 3 nm和 5 43 nm激光 ,通过干涉测量和小数重合法 ,得到标准环规内尺寸 ,其不确定度可以达到或优于 0 .0 5μm +0 .5× 10 - 6

A new method for the trace of standard ring gauge is proposed.By means of interferometry and fraction coincidence,the internal size of the standard ring gauge can be measured by using 633nm and 543nm lasers,with the uncertaity mot greater than 0\^05μm +0\^5×10 -6 d.