基于白光干涉原理的微齿轮几何特征检测

A white-light interference-based measurement of the geometric characteristic of micro device

将垂直扫描白光干涉(VSI)测量方法应用于微齿轮的几何特性检测中,该方法具有非接触、大量程、高精度、高效率等特点,水平分辨力为亚微米级,垂直分辨力可以达到纳米量级,并通过Hilbert变换法提取包络峰值来恢复被测表面的三维形貌尺寸。研究结果表明,垂直扫描白光干涉测量方法能够实现微齿轮几何特性的检测,满足设计中提出的精度要求。

Vertical scanning white-light interference （VSI）, characterized by non-contact, large range, high precision, good efficiency and submicron level resolution, is usually used to measure the geometric characteristics of micro gear. The vertical resolution of VSI can hit a nanometer level and extract the envelope peak to recover the 3D topography of measured surface through Hilbert transformed method. An experimental result shows that VSI performs well in measuring the geometric characteristics of micro-gear and meets the requirements for precision presented in mechanical designs.