摘要
在原有基础上研制出复合型便携式真空计校准装置。将静态比较法、静态膨胀法及动态流量法复合在一台装置上,仅采用一台满量程为1.33×105Pa的电容薄膜真空计作为参考标准,实现较宽的真空度校准范围。实验结果表明,装置的校准范围为105Pa～10-5Pa,合成标准不确定度为1.3%～2.5%。装置的外形尺寸为450 mm×400 mm×750 mm,总重量小于35 kg,在原有校准装置的基础上减小了重量和成本,更适用于许多应用领域中真空计的现场校准。
A compound and portable vacuum calibration apparatus has been developed depending on the existing device. The wide calibration range of vacuum degree can be achieved by three methods integrated on one apparatus, which are static comparison method, static expansion method and dynamic throughput method. There is only one capacitance diaphragm gauge （CDG） with full range of 1.33×10^5Pa used as reference standard. The experimental results proved that the calibration range is 10^5Pa-10^-5Pa, and the combined standard uncertainty is 1.3%-2.5%. Besides, the size of this apparatus is 450mm×400mm× 750mm, and its total weight is less than 35kg. So the weight and cost of it are reduced compared with the existing device, and this apparatus is more suitable for on-site vacuum gauge calibration in many application fields.
出处
《真空》
CAS
2013年第3期1-5,共5页
Vacuum
关键词
校准装置
校准方法
便携式
真空计
calibration apparatus
calibration method
portable
vacuum gauge
