多弧离子镀TiN/TiCrN/CrN多元多层复合膜的制备及性能研究

The preparation and properties of TiN/TiCrN/CrN multiple multi-layer composite film by multi-arc ion plating

采用XH-800多弧离子镀设备在硬质合金刀具表面制备TiN/TiCrN/CrN多元多层复合膜。利用XRD、SEM、显微硬度计、多功能材料表面性能测试仪等对其组织结构与性能进行了研究。结果表明:膜层表面均匀,未出现龟裂现象,色泽光亮度好;膜的相结构组成为TiN和Cr2N,随着Cr靶电流的增大,TiN的择优取向由(200)向(111)转变,膜层出现单质Cr;膜层厚度为5.02μm,具有明显多层特征;显微硬度2536 HV;结合力65 N。

TiN/TiCrN/CrN multiple multi-layer composite films were deposited on the cemented carbide tool surfaces by the XH-800 multi-arc ion plating equipment. The film＇s structure and performance were investigated by XRD, SEM, microhardncss tester, multifunctional material surface performance tester and so on. The results indicate that the film shface is even without map cracking and have good color brightness; the films are composed of TiN and Cr2N phase, and with the chromium target current increasing, the preferred orientation of TiN changes from （200） into （111）, and also appears elemental Cr; the film thickness is 5.02μm, with obvious muhilayer features; the micro hardness is 2536HV; the binding force is 65N.