激光加速实验超薄类金刚石碳靶的制备

Preparation of ultra-thin DLC target for laser ion acceleration

采用过滤阴极真空弧法,制备了满足激光稳相加速机制要求的超薄自支撑类金刚石碳靶。室温下沉积,基片偏压为-32V,薄膜沉积速率约为每脉冲0.002nm。选取NaCl膜作脱膜剂,采用漂浮法进行脱膜。打捞板孔径为1mm时,自支撑厚度范围为5～50nm,自支撑成功率约为70%。利用拉曼光谱仪及原子力显微镜等仪器,测量了薄膜的结构、表面粗糙度等关键参数。

Self-supporting diamond like-carbon （DLC） films have been manufactured successfully using the filtered cathodic vacuum arc system, which are ideal targets for laser phase stable acceleration regime. The film is deposited at room temperature with a --32 V substrate bias voltage. The deposition rate is about 0. 002 nm per pulse. Practically, the NaC1 is deposited first as a sacrificial layer before carbon deposition. A holder with round holes is used to support the DLC film after the NaC1 layer is dis solved in the water. Films with thickness 5 50 nm can mount over the apertures with a diameter up to 1 mm and the success rate is about 70%. The structure and roughness of the film have been measured by the Raman spectrum and atomic force microscope.