非球面光学反射镜的装调方法

Alignment method of aspheric optical reflector

针对通过胶粘固定的口径为230mm非球面反射镜的装调要求,选用无像差面型检测法,通过对3个关键过程,即底板与裸镜的粘接,镜框与底板的连接,光学定心加工的实验研究,提出使粘接应力及结构件传导应力变化量达到最小的微应力装校方法,并通过光学定心加工标定出非球面反射镜的光学中心。装调结果表明:对于口径为230mm的非球面反射镜,微应力装调后面型精度≤0.02λ;光学中心偏心量≤5μm,分划板表面与光轴垂直度误差≤2.5″。

According to the alignment demand of aspheric mirror with aperture of 230 mm, u- sing the aberrationless surface figure test method, based on the three key processes of experi- mental research （bonding between the bottom plate and bare mirror; connection of the frame and the bottom plate; calibration of optical center）, micro-stress alignment method that could get the minimum variation of the adhesive stress and conduction stress of structure was put for- ward, and aspheric mirror optical center was calibrated through the optical alignment. Align- ment results show that surface shape error of the aspherie mirror with aperture of 230 mm is less than or equal to O. 023,, optical center offset is less than or equal to 5 μm, calibrated and the optical axis perpendicularity error is less than or equal to 2.5＂ plate was