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Wafer scale direct-write of Ge and Si nanostructures with conducting stamps and a modified mask aligner

Wafer scale direct-write of Ge and Si nanostructures with conducting stamps and a modified mask aligner
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出处 《Nano Research》 SCIE EI CAS CSCD 2013年第4期263-268,共6页 纳米研究(英文版)
关键词 硅纳米结构 邮票 晶圆 光罩 导电 SI Ge 半导体行业 Ge,Si,nanolithography,microcontact printing,scanning probe lithography
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