以SiC过渡层为预处理工艺的金刚石涂层硬质合金微径铣刀研究

Research on Diamond Films Deposition Horniness Alloy Micro End Mills Taking SiC Interlayers as Pretreatment Process

研究了采用强电流直流伸展电弧等离子体CVD技术,以SiC过渡层为预处理工艺,直径为0.8mm的微径铣刀上纳米金刚石涂层的制备。通过铣削6063DL31铝合金并与未涂层的微径铣刀进行对比,验证SiC过渡层+金刚石涂层微径铣刀的切削性能。结果表明,SiC过渡层可以有效降低Co对金刚石涂层沉积的不利影响,改善金刚石涂层的附着力,同时,铝合金铣削试验表明,金刚石涂层微径铣刀可以有效降低切屑的黏结和毛刺的形成,并且显著降低加工工件的表面粗糙度;因此,薄SiC过渡层可以作为预处理工艺应用于微径铣刀上金刚石涂层的制备。

Taking SiC film interlayers as pretreatment process, diamond films of 0.8 mm diameter on micro end mills were deposited by high-current extended DC arc plasma CVD technique. For the sake of comparison,milling tests were car- ried out under identical conditions using WC-Co micro end mill with no film,which testified the cutting performance of SiC interlayers ＋ diamond film micro end mills. The results showed that by using SiC interlayer,adverse catalytic effect of the Co binder phase in the cemented carbide substrates could be restrained, so that the adhesion of the diamond coatings could be ensured, at the same time, the tests results demonstrated much lower adhesion of aluminum to the tool and enable dry machi- ning with little or no burr formation. The coatings achieve a much better surface finish. Therefore, thin SiC interlayers proved to be a new viable alternative and suitable option for adherent diamond coatings on micro mills.