摘要
以内径1.1m的大尺寸中阶梯光栅镀膜机为例,设计了提高膜厚均匀性的修正挡板,并应用到了镀膜机中。在520mm×520mm的镀膜面积范围内,膜层厚度的均匀性误差从±6%降低至±0.96%,满足大尺寸中阶梯光栅研制的膜厚均匀性要求。
Taking 1. 1 meter internal diameter coating machine as an example, a correction baHle is designed to improve the film uniformity. The results show that the uniformity error ok the film surface is reduced from ±6% to ±0.96% in the 520 mm × 520 mm dimension. It can meet the requirement of large size echelle gratings.
出处
《长春工业大学学报》
CAS
2013年第2期195-199,共5页
Journal of Changchun University of Technology
基金
国家重大科研装备研制基金资助项目(ZBY2008-1)
吉林省重大科技攻关基金资助项目(09ZDGG005)
关键词
镀膜机
中阶梯光栅
膜层均匀性
coating machine
echelle grating
film uniformity.
