复合膜对316L不锈钢氚渗透性能的影响

Effect of Multiple Film on the Tritium Permeation Property in 316L Stainless Steel

利用物理气相沉积(PVD)方法在316L不锈钢表面分别镀制微米量级厚的TiN+TiC+TiN、TiN+TiC+SiO2复合膜。扫描电镜观察表明:膜致密,与基体结合牢固,抗氧化,抗热冲击。二次离子质谱(SIMS)和红外光谱(IR)分析结果证实:TiC和SiO2膜在300℃以上的氢中退火可形成抗氚渗透阻挡层。测量了不同温度下氚在带膜316L中的渗透率。在200～600℃范围内,镀有TiN+TiC+SiO2膜的316L的氚渗透率比镀钯316L降低4～6个数量级,镀TiN+TiC+TiN膜比镀钯膜降低4～5个数量级。这两种膜可用于聚变堆技术研究中第一壁。

The films of TiN+TiC+TiN and TiN+TiC+SiO 2 were deposited on the surface of 316L stainless steel by physical vapor deposition technology. The characteristics of films are tested by SEM technology, it shows that the films are compact, thermal shock resistant, oxidation resistant and have good compatibility with bulk. The SIMS and IR analysis results show that the tritium permeation barrier is formed when TiC and SiO 2 films are annealed in hydrogen above 300 ℃. The tritium permeability in 316L with film is measured at various temperature, the results show that the tritium permeability in 316L with TiN+TiC+SiO 2 film is 4～6 orders of magnitude lower, and that in 316L with TiN+TiC+TiN film is 4～5 orders of magnitude lower than that in 316L with Pd film at about 200～600 ℃. These films may be used as the surface coating of the first wall, tritium blanket and heat exchanger in fusion reactor.