期刊文献+

热处理工艺对纳米ZnO薄膜结晶取向及表面形貌的影响

The Effect of Heat Treatment Process on Orientational Crystallization and Surface Topograph of ZnO Thin Films
下载PDF
导出
摘要 以二水合醋酸锌作为前躯体,单乙醇胺(MEA)作为稳定剂,乙二醇甲醚作为溶剂制备出均匀稳定的溶胶,通过浸渍-提拉法将氧化锌薄膜沉积在玻璃基底上,研究热处理工艺对薄膜结晶取向和表面形貌的影响。随着煅烧温度和煅烧时间的增加,ZnO薄膜表面逐渐致密平滑,(002)峰的强度增大,晶粒尺寸增大。实验结果表明:在500℃煅烧下煅烧两次,煅烧时间为1h制备的薄膜衍射特征峰(002)最强,颗粒最均匀,结合最致密且薄膜表面光滑平整。 Zinc oxide (ZnO) thin films were deposited glass substrates by sol-gel dip-coat- ing method. Zinc acetate (ZnAc) dehydrate is used as the starting saltmaterial source and monoethanolamine (MEA) is used as stabilizer, and the effect of heat treatment process on orientational crystallization and surface topograph of ZnO thin films is discussed. With an- nealing temperature increasing, ZnO thin surface gradually becomes density smooth, inten- sity of (002) becomes higher and crystaUite dimension becomes larger. The result indica- ted, when annealing temperature was 500 ℃, annealing time was 1 h and annealing method was twice, ZnO thin films presented the best (002)characteristic peak and surface topo- graph, at the same time ZnO particle combined presented the most dense and uniform.
出处 《沈阳理工大学学报》 CAS 2013年第3期12-16,共5页 Journal of Shenyang Ligong University
关键词 纳米ZNO薄膜 结晶取向 煅烧工艺 表面形貌 ZnO thin films orientational crystallization heat treatment process surface to-pograph
  • 相关文献

参考文献11

  • 1Stone N J, Ahmed H. Silicon Single Electron Memory Cell [J]. Appl Phys lett, 1998,73 ( 15 ) :2134 - 2136.
  • 2Yamazoe N, Nno Y. Zinc-oxide-based Semiconductor Sensors for Detecting Acetone and Capronaldehyde in the Vapour of Consomm6 Soup [ J ]. Sensor Actuators, 1995,25 ( 1 - 3 ) :623 - 627.
  • 3Y. Yoshio, T. Makino, Y. Katayama, et al. Optimiza- tion of zinc oxide thin film for surface acoustic wave filters by radio frequency sputtering I J ]. Vacuum, 2000,59 (2 - 3) :538 - 545.
  • 4Huang M H, Wu Y Y, Feick H N, et al. Catalytic Growth of ZnO Nanowire by Vapor Transport [ J ]. Adv Mater,2001,13(2) :113 - 116.
  • 5Dal Y, Zhang Y, Li Q K, et al. Synthesis and Optical Properties of Tetrapod-like Zinc Oxide Nanorods [ J ]. Chemical Physics Letters ,2002,358( 1 - 2) :83 - 86.
  • 6Puriea M, Budianu E. Optical and Structural Investiga- tion of ZnO Thin Film Prepared by Chemical Vapor Deposition(CVD) [ J ]. Thin solid Film, 2002,403 - 404:485 - 488.
  • 7P. K. Gift, Soumen Dhara, Ritun Chakraborty. Effect of ZnO seed layer on the catalytic growth of vertically a- ligned ZnO nanorod arrays [ J ]. Materials Chemistry and Physics,2010,122( 1 ) :18 -22.
  • 8冉德超,张传斌,张玮,傅敏.溶胶-凝胶(Sol-Gel)法制备纳米氧化锌的研究进展[J].重庆工商大学学报(自然科学版),2009,26(2):113-116. 被引量:7
  • 9B. M. Ataev, A. M. Bagamadova, V. V. Mamedov, et al. Epitaxial ZnO films on non-crystalline substrates [J]. Materials Science and Engineering: B, 1999,68 (1) :56 -58.
  • 10张文杰,白佳威.热处理工艺对多孔TiO_2薄膜光催化性能的影响[J].功能材料,2012,43(4):504-507. 被引量:2

二级参考文献8

共引文献7

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部