二元掺杂对SnO_2薄膜的结构与光学性能的影响

Influence of Binary Doping on the Structure and Optical Performance of SnO_2 Thin Film

采用超声雾化热解法在石英玻璃基底上制备了SnO2/Sb∶Ni薄膜,并对薄膜的晶体结构、表面形貌和光学性能进行了表征。结果表明:薄膜晶粒生长致密,晶粒大小均匀,呈柱状晶结构,(200)晶面是优势生长面。经过二元掺杂后,薄膜的平均可见光透过率最高为87.54%;波长为300 nm时,薄膜的紫外透过率约为50%。

SnO2/Sb∶ Ni thin films were prepared on quartz glass substrate by ultrasonic spray pyrolysis method.The crystal structure,surface morphology and optical properties were characterized.The results showed that the grains of thin film grow density with uniform size,and have columnar crystal structure,and(200)crystal plane is the advantage growth face.After binary doping,average visible light transmittance is 87.54%,and UV transmittance is about 50% when the wavelength for 300 nm.