基于LTCC技术的电容式无源压力传感器制备

Preparation of capacitive passive pressure sensor based on LTCC technology

因陶瓷有稳定的电特性、机械鲁棒性和化学惰性而得到广泛的应用。为了实现高温、高压、潮湿等恶劣环境中的压力测试,以一种陶瓷和耐高温导电浆料为基质,采用低温共烧陶瓷(LTCC)工艺技术和非接触无线传输设计方法实现传感器的制备。传感器以LC谐振电路为基本工作原理,通过丝网印刷技术来实现电感、电容、导带等无源器件的安置,并且在空腔中填入碳膜(印刷碳浆料)有效地防止了层压中空腔的坍塌,所制传感器避免了器件的封装,引线外连,为传感器工作于高温、高压、潮湿等恶劣环境中奠定基础。

Ceramic has been widely applied for its stable electrical properties,mechanical robustness and chemically inert.In order to realize the stress test in high temperature,high pressure,humidity and other harsh environment,with a kind of ceramics and high temperature resistant conductive paste for matrix,use LTCC technology and non-contact wireless transmission design method to realize sensor preparation.LC resonant circuit is used as basic working principle of sensor,by screen printing technology to achieve placement of passive devices such as inductance,capacitance,conduction band,and fill carbon film（printed carbon paste）in the cavity which effectively prevents the pyramid in the cavity collapses.The sensor avoids device packaging,wire connecting outside and lay a foundation for sensor working in high temperature,high pressure,humidity and other harsh environments.