MEMS薄膜泊松比测试方法的研究进展

Research Progress of Testing Methods for Poisson Ratio of MEMS Thin Films

综述了MEMS薄膜泊松比的测试方法,简述了测试薄膜泊松比的目的和意义。结合测试环境与测试手段详细地列举了几类常用的测试方法:拉伸法、纳米压痕法、鼓膜法、谐振法、弯曲法和扭转变形法,介绍了各种测试方法的发展过程,并分析了各种测试方法在使用中所面临的关键问题。最后,从可操作性、精确度和适用范围等方面比较了各种方法的优劣,给出了测试方法选取的建议,并对MEMS薄膜测试技术的发展进行了展望,指出在线测试技术将推动MEMS薄膜测试技术的进一步发展。

The testing methods on Poisson ratio of micro-electromechanical system （MEMS） thin films are reviewed. Firstly, the intention and significance of measuring Poisson ratio of thin films are briefly introduced. Then, some typical testing methods, such as the tensile, nanoindentation, bulge, resonance, bending and torsion are presented combining with the testing environment and means. The evolution and challenges of these methods are presented. Finally, the operability, accuracy and applicability of these methods are compared, and the recommendation about how to choose these methods is given. Besides that, the future development of the testing technology of MEMS thin films is prospected, and it is pointed out that the in-situ testing technology will improve the further development of the testing technology for MEMS thin films.