TFT-LCD生产设备洁净度提升研究

The Cleanliness Improve Research of TFT-LCD Production Equipment

洁净室设备内环境是产品最近的环境,设备内洁净度直接影响产品品质,随着现在科学技术的高速发展,对生产设备内部环境洁净度要求越来越高。通过薄膜晶体管液晶显示模块(TFT-LCD)生产线设备内环境洁净度的提升,得到了非常重要的一线数据,积累了很多经验。粒子(Particle)是洁净间产品品质最大的敌人,设备内环境就是产品的环境,设备内环境洁净度的改善和控制是非常重要和必要的。

Clean room equipment internal environment is the nearest environment of product, equipment cleanliness directly affect the product quality, now with the rapid development of science and technology, the production equipment internal cleanliness demand is higher and higher. This paper through the TFT-LCD production line equipment internal cleanliness improved that has been one of the most important line data, and accumulated a lot of experience o Particle is the biggest enemy of clean room products quality, equipment internal environment is the environment of production, equipment internal environment cleanliness improvement and control is very important and necessary.