纳米ZrO_2的性能及其气敏性的研究

Investigation of the Properties of Nanometer-sized ZrO_2 and Gas-sensing Property

本文用沉淀法制备出平均晶粒尺寸在18nm的单斜相ZrO_2纳米粉末。并对其的形状和大小进行了透射电镜及激光散射分析,确认ZrO_2粒子为球形,分散性较好,平均粒径约70～80nm。本文着重研究了纳米级ZrO_2细粉对乙醇的气敏性能,结果表明,用纳米级ZrO_2粒子制备的气敏元件对乙醇气体有好的敏感性,并且随着纳米粒子尺寸降低,对气体敏感性增强。

Nanopartides of monoclinic ZrO2 with grain size of 18nm was prepared by the method of precipitation. The shape and size of the nanoparticles was analyzed by TEM and Laser Scattering. It is shown that the particle of ZrO2 is ball shaped and has good dispersitility,with average size of 70-80nm in water solution. Emphasis was put on sensitivity of the nanoparticles of ZrO2 to ethanol gas. The results show that the gas-sensing parts prepared with nano-meter material of ZrO2 has good property to ethanol gas and the sensitivity increased as the diameter of nanoparticles ZrO2 decreased.