摘要
纳米压印技术由于具有操作简单、高分辨率、成本低、重复性高等优点,近年来受到国内外研究机构的高度重视。本文主要介绍了目前主流的几种纳米压印技术,并简要概述了纳米压印技术的研究现状和应用前景。
In recent years, nanoimpfint lithography has attracted a lot of attention technology because of its advantages of simple operation, high resolution, low cost and high repeatability. This paper mainly introduces the current mainstream nanoimprint technology, and briefly summarizes the current research situation and future directions of nanoimprint technology.
出处
《激光杂志》
CAS
CSCD
北大核心
2013年第3期1-3,共3页
Laser Journal
