一种新型分析扫描电子显微镜

A New Type of Analytical Scanning Electron Microscope

研制了一种用于样品成分分布分析的新型结构扫描电子显微镜．在该电镜中，同轴和近轴背反射电子经物镜聚焦和滤波后穿过探测器窗口被接收，与常规电镜相比，由这些高能同轴背反射电子所成的像反映了样品表面的不同成分分布信息，其形貌衬度被有效地抑制．这种新型电镜使得用一个探测器进行元素成分分布分析成为现实，为科学研究提供了一种简单实用的分析手段．

We present a particular detection geometry of backscattered electrons in scanning electron microscope, which is applied to the sample composition analysis. The electrons coming from a field emission electron gun are accelerated and focused by the first lens; the electrons beam is demagnified at the sample surface by the objective lens. The backscattered electrons close or parallel to the incident beam orientation are focused and filtered in energy by the objective lens, so the coaxial backscattered electrons passing through the detector window are collected by a detector system. These coaxial backscattered electrons form an image, which give the phase difference information of the sample surface, the topographic contrast is effectively eliminated. Thus this technique is very suitable to the composition analysis.