乙醇基溶胶-凝胶法制备BNKLT无铅压电薄膜

BNKLT Lead-free Piezoelectric Thin Films Prepared by Ethanol-based Sol-Gel Method

以乙醇作溶剂,氧化物和碳酸盐为原料,利用溶胶-凝胶法制备了Bi0.5(Na0.7K0.2Li0.1)TiO3(BNKLT)无铅压电薄膜。通过红外光谱(IR)、同步热分析仪(TG-DSC)、X线衍射仪(XRD)及扫描电子显微镜(SEM)等分析了乙醇基溶胶-凝胶法制备BNKLT压电薄膜的工艺参数。结果表明,乙酰丙酮与Ti(OC4H9)4的物质的量比(N)≥1.0时,反应温度4060℃,pH=2.02.5,能获得稳定性良好的乙醇基溶胶;采用旋涂法制备的湿膜在600℃热处理30min后,可得表面光亮平整,厚度均一,致密性良好,单一钙钛矿结构的BNKLT无铅压电薄膜。

Bi0.5（Na0.7K0.2Li0.1）0.5TiO3 （BNKLT） lead-free piezoelectric thin films were prepared with ethanol as the solvent, inorganic oxides and carbonates as starting materials by using the ethanol-based Sol-Gel method. The influences of process parameters on the thin films were analyzed by the IR, TG-DSC, XRD, SEM. The results show that the ethanol-based sol with good stability can be obtained when the proportion （N） of acetylaeetone to Ti（OC4 H9）4 is equal to or greater than l. 0, the reaction temperature is 40-60 ℃, and pH is 2.0-2.5. After be- ing annealed at 600 ℃for 30 min, BNKLT thin films are dense and exhibit pure perovskite structure, smooth sur- face and uniform thickness.