晶圆探针测试系统校准

Calibration on Probe Test System for Wafer

阐述了消除探针测试系统误差的方法,通过分析校准原理和计算校准模型,提出了把已知的校准位放在校准基片上,通过修改网络分析仪(VNA)的校准位和信号接收端口,利用探针台的移动和探针与校准位的接触提取和反馈信号,修正系统误差。

The method to eliminate the error of the probe test system for wafer was discussed in this paper. Through analyzing the calibration theory and calculating the calibration model, the known calibration position can be placed on the calibration substrate. By modifying the calibration position of VNA and the signal receiving port, the signals can be extracted and fed back by using the movement of the probe platform and the contact between the probe and the calibration position, and then the error of the probe test system can be corrected.