基于改进的非线性小数重合法的轮廓测量

Profilometry based on the improved nonlinear excess fraction method

为实现复杂物体形状的可靠测量 ,提出基于相位 -高度关系的非线性小数重合法原理。用独立于任何实际应用的一般形式给出了该算法的数学表述 ,并以此为基础设计了一套双频光栅投影轮廓测量系统。对标定结果的分析表明该系统在 75 .6 0 m m的高度测量范围内测量不确定度小于70μm。与基于相位 -坐标关系的非线性小数重合法相比 ,该算法的数学表述更加明晰 ,应用也更加方便。该技术可用来实现实用、可靠。

Principle of the nonlinear excess fraction method based on phase height relations was proposed for the robust shape measurement of complex objects. The algorithm was presented as a mathematical description independent of any applications and was used to design a dual frequency grating projection profilometry system. The analysis of the calibation results indicates that the measurement uncertainty is less than 70μm over a height range of 75.60mm. Compared with the nonlinear excess fraction method based on phase coordinate relations, this algorithm is clearer mathematically and more convenient for applications. The technique can be used for practical, high accuracy and automatic three dimensional shape measurement.