一种扭摆式加速度计的结构

Structure of a torsional accelerometer

在传感器日趋微小型化的趋势下 ,该文提出一种扭摆式加速度计的结构。并对其进行了数学建模 ,分析了加速度输入时质量片扭转角的大小、力矩器产生的静电引力及支承梁的弯曲挠度和电容误差 ,给出了检测得到的加速度计的性能。结果表明 ,文中上述问题的分析思路是合理的 。

Silicon microaccelerometers are applied more and more to products due to its tiny size. The structure of a torsional accelerometer was analyzed. A mathematical model was created to analyze the torsional angle of the mass following the input acceleration, the electrostatic force caused by the torque generator, the bending of the torsion har and the capacitance error. The results are compared with the tested performance of an accelerometer demonstrating that the analysis is reasonable.