深孔直线度检测系统

Linearity Detecting System for Deep Holes

针对深孔直线度测量的实际问题,提出了基于PSD的位置检测技术,建立了以激光二极管、PSD和自动定心装置组成的检测系统。设计了系统的自动调节检测装置结构和光学部分,并对检测系统进行了分析。从而为深孔测量提供了一种检测技术,该系统能满足测量要求,对深孔直线度检测具有一定的前景。

The measurement technique of position based on PSD （Position Sensitive Detector）is proposed for mea- suing the linearity, and the measurement system is also established with laser diode, PSD and self-centering device. The measurement structure and the control system are designed and analyzed. The technique provides a kind of measurement way, which can satisfy measurement requirement and has some prospect in the areas of linearity measurement.