摘要
ITO靶材是导电玻璃、LED、太阳能电池等行业的核心材料之一。综合评述了高密度ITO靶材的研究现状。介绍了ITO粉末的制备方法如机械混合法、喷雾热分解法、喷雾燃烧法、化学共沉淀法、金属醇盐水解法、水热合成法等以及ITO靶材的制备工艺。比较和分析了ITO粉体和靶材各制备工艺的优缺点。最后提出了制备高品质ITO靶材的研究方向。
ITO target is one of the core materials of the conductive glasses, LED and solar cells. The research status of high density ITO target is reviewed. Preparation methods of ITO nanoparticles such as mechanical mixing, spray pyrolysis method, spray combustion, chemical co-precipitation, metal alkoxide hydrolysis method and hydro- thermal synthesis method are summarized and analyzed, as well as the ITO target. The research directions for the preparation of good quality ITO target are also proposed.
基金
云南省创新团队项目(2012FC027)
国家支撑计划项目(2012BAE06B05)
关键词
氧化铟锡靶材
高密度
制备
ITO target, high density, preparation
