水射流辅助激光刻蚀Al_2O_3陶瓷的试验研究

Experimental Investigation of Water Jet-Assisted Laser Etching on Al_2O_3 Ceramics

设计了一套用于实验的水射流辅助激光刻蚀加工装置,将激光和介质射流冲蚀加工相结合,研究激光加工参数和射流加工参数对试样材料激光复合刻蚀量和截面质量的影响。实验结果表明,激光工艺参数和射流加工参数对工件加工表面的质量优劣有着决定性的影响;该复合加工工艺可以清除加工时产生的90%以上熔渣,能有效地降低材料表面粗糙度,使得加工出的盲孔成为较为规则的倒三角(▽)形。

An experimental device of water jet--assisted laser etching was designed, laser etching technology was combined with a medium--jet erosion processing,and the influences of laser process- ing parameters and jet processing parameters on the etching capacity and cross section quality of mate- rial sample were studied. The results show that the laser processing parameters and jet processing pa- rameters have a decisive impact on the quality of the workpiece, the compound processing technology can remove above 90% melting slags which are produced by the laser processing, and the surface roughness are reduced effectively. The blind holes of the machined materials have a regular inverted triangle shape.