摘要
用中温化学气相沉积工艺制备TiC0.81N0.48和TiC0.61N0.44O0.15涂层,用显微维氏硬度计测定TiCN和TiCNO涂层的硬度,用X射线衍射仪和激光拉曼光谱仪分析涂层的结构,研究了TiCN和TiCNO涂层在700℃真空退火后的组织结构转变对硬度的影响。结果表明:真空退火后TiC0.81N0.48和TiC0.61N0.44O0.15涂层的硬度先下降,然后趋于稳定。TiC0.81N0.48和TiC0.61N0.44O0.15涂层在700℃真空退火时,C原子从TiCN晶格析出后先形成sp3C;随着退火时间的延长,sp3C逐渐向sp2C转变;随后sp2C团簇增加,无序程度降低,TiCN逐渐分解为TiC和TiN相。硬度的降低,是由于涂层内缺陷密度的减少使应力释放,还与高温下TiC0.81N0.48和TiC0.61N0.44O0.15涂层组织结构的转变,特别是sp3C和sp2C的形成有关。与TiC0.61N0.44O0.15涂层相比,在700℃真空退火时TiC0.81N0.48涂层组织转变的进程加快,热稳定性能较差。
TiC0.81N0.48 andTiC0.61N0.44O0.15 coating deposited by medium temperature chemical va- por deposition, were characterized by Vickers hardness tester, X-ray diffraction （XRD） and confocal Ra- man spectrometer, and the effect of microstructure transformation on the hardness was investigated. Re- sults show that the hardness of TiC0.81N0.48 and TiC0.61N0.44O0.15 coatings declines after annealing at 700 ℃ in vacuum, and then tends to be stable. At the beginning of the annealing, some C atoms escape from the lattice of TiCN, resulting in the formation of sp^3C. As the annealing time prolongs, s^p3C transforms to sp^2C gradually. Thereafter the clustering of sp^2C increases, the disorder degree decreases, and TiCN de- composes into TiC and TiN. The decrease of hardness is related with the release of residual stress due to the defect annihilation. Besides, the microstructure transformation especially the formation of sp3C and sp2C decreases the hardness of coatings. Compared with TiC0.61N0.44O0.15, the microstructure transforma- tion takes places earlier in TiC0.81N0.48 coating, which exhibits worse thermal stability.
出处
《材料研究学报》
EI
CAS
CSCD
北大核心
2013年第3期312-316,共5页
Chinese Journal of Materials Research
基金
美国肯纳公司资助项目~~
关键词
材料失效与保护
TiCN涂层
热稳定性
相转变
硬度
materials failure and protection, TiCN coatings, thermal stability, microstructure transforma-tion, hardness
