摘要
介绍了自行研制的国内首条宽幅(1 250mm)"空到空、卷对卷"结构连续真空镀膜生产线,并在铜(铝)带材上连续沉积钛基选择性吸收涂层.通过反应气体的分压控制,实现多级溅射法制备多层膜系过程中各单层膜厚和组分的精确控制,强化了吸收层间的干涉效应,改善了涂层的光学性能,同时保证了工艺过程的稳定性和可重复性,涂层的吸收率为(95±2)%,发射率为(5±2)%.
Titanium based spectrally selective absorption coatings are continuous production on copper/alu- minum strip using the first ＂air to air, roll to roll＂ continuous coatings line（1250mm width）in China devel- oped by ourselves. By reactive gas partial pressure control, we realize precise control of single-layer thick- ness in multistage sputtering process, enhance interference effects between the absorbing coatings, and then improve coating optical properties. Meanwhile,the stability and reproducibility of the process are ensured. High solar absorptance of （95±2）% has been achieved with lowthermal emittance of （5±2）%.
出处
《兰州交通大学学报》
CAS
2013年第3期62-65,共4页
Journal of Lanzhou Jiaotong University
基金
国家"863"课题支持(2012AA040207)
