摘要
在降低多晶硅成本及提高生产效率的前提下,对多晶硅铸锭炉进行了研究调查,通过对多晶硅铸锭炉结构进行改进,对热场等关键部位进行了重新的开发设计,提高了单炉单次的生产量,满足生产要求。
In the lower polysilicon costs and increase production efficiency, the investigation of polycrystalline silicon ingot furnace, through the improvement of the polycrystalline silicon ingot furnace structure, for the development and design of the key parts to the thermal field, improve the production of single single furnace, meet the production requirements.
出处
《电子工业专用设备》
2013年第6期17-20,共4页
Equipment for Electronic Products Manufacturing
关键词
多晶硅铸锭炉
加热器
热场改进
Polysilicon Ingot Furnace
Heating chamber
Thermal insulation
