整体式晶圆连续自动物料搬运系统性能分析

Performance analysis for continuous AMHS with united layout

为了快速、准确地评估整体式连续自动物料搬运系统的在制品量,引入排队理论中的相关知识构建了数学性能分析模型。在考虑捷径布置与转向装置服务时间变动性的基础上,采用合适的排队模型构建针对Inter-bay的性能分析模型。在考虑加工设备有限缓存容量、损失晶舟循环反馈的情况下,应用M/M/1/K模型及其反馈特性构建Intrabay的性能分析模型。以24个Intrabay的300mm晶圆制造系统为例来验证分析模型。通过与A-rena软件仿真结果对比分析,证明了数学分析模型在评估系统在制品、设备利用率等相关性能方面的准确性。

To quickly and accurately estimate the expected Work In Process （WIP） of integral continuous Automated Material Handling System （AMHS） with united layout, a queuing-based performance analytical model was presented. By considering the layout of crossovers and the variability of steering device＇s service time, the suitable queuing models were used to build the mathematical model for interbay. Based on the machine buffer with finite capacity and loss lot with feedback, the M/M/1/K model with its feedback characteristic was introduced to structure the analytical model for intrabay. A 300mm wafer fabs with 24 intraday was applied to evaluate the proposed model. Compared with the results of an Arena simulation, the accuracy of proposed model on relevant performs such as WIP and equipment utilization ratio was proved.