静电悬浮转子微陀螺悬浮控制系统级仿真

System-level simulation of levitation control for a micromachined electrostatically suspended gyroscope

给出了一种基于MEMS技术的静电悬浮转子微陀螺,可同时测量两轴角速度和三轴线加速度;采用力平衡原理和力矩平衡原理测量壳体输入的线加速度和角速度,即对转子实行闭环控制使转子保持在零位,输出控制电压反映壳体输入线加速度和角速度的大小。针对转子结构,提出了一种基于模拟PID技术的非集中控制策略来实现悬浮控制,建立了一种基于Coventorware的机电混合仿真模型,对结构、电路和控制进行通盘考虑。通过起支仿真和加速度输入仿真可以看出,系统级仿真结果表明了其具有仿真速度快、仿真结果准确等优点,在与实验结果的比较中证实仿真结果的准确性和有效性。

This paper presents a novel electrostatically suspended gyroscope based on MEMS technology, which can measure dual-axis angular velocity and tri-axis linear acceleration. It adopts the force balance and torque balance ways to measure the linear acceleration and angular velocity input by the shell. It keeps the rotor at the zero position by close-loop control, and the control voltage reflects the input linear acceleration and angular velocity. An analogue PID control strategy based on non-centralized control is given to realize levitation control. A mechanic hybrid electronics model is constructed by software Coventorware, which takes account of the construction, circuit and control in a whole model. The initial levitation and linear acceleration input simulation show that the system-level simulation has the merit of fast simulation speed and high precision results, which can be verified the validity and correctness by the experimental results.