大尺寸玻璃网格板制作工艺的研究

Research on Fabrication Technology of Large-scale Glass Grid Board

玻璃网格板是一种相互垂直的纵、横刻线的二维线纹标准器,用来检测航测仪器、遥感仪器和各类二维坐标测量仪器的精度,因此,它的精度直接影响待检仪器的精度。结合计量圆光栅的制作工艺,详细介绍了基于光刻胶的玻璃网格板新型制作工艺,检验结果表明该种工艺制作的玻璃网格板线条均匀,280mm内刻线间距精度小于1μm。

Glass grid board is a kind of standard 2D instrument with vertical score lines and horizontal score lines.It is used to test the precision of various types of 2D coordinates test instruments such as aerial survey instruments, remote sensing instruments. So, the precision of glass grid board affects the precision of instruments to be tested.In this paper, combining the fabrication technology of metrology circular grating, a new fabrication technology of glass grid board based on photo-resist is introduced in detail.Testing results indicate that the lines width of the glass grid board which is fabricated by the new technology is uniformity, the precision of interval between scribed lines less than 1μm within 280mm.