高精度小口径非球面加工工艺研究

Research on the Processing Technology of High Precision Minor-caliber Aspheric Surface

光学非球面镜是在通常的球面镜上增加了高次曲率,具有球面镜无法比拟的诸多优点,它的应用使光学系统具有更高的分辨率和成像质量。因此,无论在军用和民用方面都得到了广泛的应用。本文是以Φ6mm的石英玻璃透镜为研究对象,目的是研发一种针对高精度小口径非球面的加工工艺。本文以Preston理论作为基础,将数控光学表面成型技术(CCOS)和传统加工技术结合,对透镜进行数控磨削、抛光、和手工修抛等工序,并对加工过程中的各种误差进行分析并予以修正使面型精度达到0.28μm,表面光洁度达到国际III级。此种加工工艺具有加工效率高、重复性好等优点。

Compared with spherical mirror, aspheric mirror is a kind of mirror with high order curvature, which has incomparable advantages. The utilization of aspheric mirror makes sure that the optical system has higher resolution and better imaging quality. Therefore, aspheric mirrors have been widely applied on both civilian and military usage. The article of this study is focusing on a kind of quartz lens which diameter of this lens is 6mm. Moreover, the aim of this project is to find out a processing technology to produce the high precision aspheric surface with small diameter. This paper is based on Preston theory and combined the CCOS and traditional processing method. The lens would be machined using different methods such as CNC grinding, polishing and artificial polishing. After these procedures, the experimental errors will be analyzed and corrected to achieve the high precision. Furthermore, the surface shape accuracy that is 0.28gin and the surface finish of the lens could meet the requirements of the third class national standard. As a result, there are many benefits of this processing technology such as high machining efficiency and well repeatable, which is also achievable for small batch production.