高精度PSD线性化方法与实验研究

Linearization Method and Experimental Research of the High-precision PSD

为了提高位置敏感探测器(PSD)的测量精度,减少其非线性带来的误差,设计了基于微位移平台的在线数据采集与校定装置,提出了基于BP神经网络的非线性校正算法,进行了数据采集和线性化实验研究,并对线性化结果进行了误差仿真分析。实验结果表明,设计的线性化算法真实有效,采用该方法校正后PSD的最大线性度误差为3.3μm,大幅减小了PSD的非线性,在不增加成本和设备复杂度的前提下大幅提高了PSD的测量精度和数据置信度,具有很高的实用价值。

In order to improve the measurement accuracy of position sensitive detector （PSD）, to reduce the nonlinearerror of PSD, the online data acquisition and calibration device based on micro displacement platform was designed, the nonlinear correction algorithm based on BP neural network was raised, the data acquisition and linearization experimental research was proceed, and the error simulation analysis was proceed to linearization results. The results indicate that the design of the linearization algorithm was real and effective, the maximum linearity error of linearized PSD is 3.3μm, the nonlinearity of PSD was substantially reduced, on the premise of doesn＇ t increase the cost and device complexity, the accuracy and data confidence of the PSD were substantially increased, and the research has a high practical value.