氢气对化学气相沉积热解炭的影响

Effect of hydrogen on chemical vapor deposition(CVD) pyrocarbon

为了研究氢气载气对化学气相沉积微环境的影响,自行设计了化学气相沉积炉并在900℃,丙烯/载气体积比为1∶10(载气分别设定为氢气和氮气),微正压条件下在石墨纸基体上进行化学气相沉积。利用气相色谱仪、气-质联用仪分析了沉积区域的沉积基元中间产物,利用扫描电镜、拉曼光谱分析了热解炭的微观结构。结果表明,与氮气载气相比,氢气载气抑制了热解炭的沉积,降低了热解炭的织构,这主要是由于氢气改变了沉积区域中小分子烃/大分子芳香烃比造成的。

Using hydrogen and nitrogen as carrier gas respectively, we studied pyrocarbon deposition on graphite paper from 1 ： 10 propylene/carrier gas at ambient pressure and 900 ℃ with self-made apparatus. The effect of hydrogen on the micro-environment of chemical vapor deposition （CVD） was explored. The intermediates in the deposition zone were analyzed by GC and GC-MS, and the microstructure of pyrocarbon was determined by HRSEM and Raman. The results showed that, compared to nitrogen, hydrogen inhibited the deposition of pyrocarbon and lowered the texture, which is mainly because that hydrogen changed the ratio of small aliphatic hydrocarbons to large aromatic hydrocarbons.