Fe_2O_3-In_2O_3复合薄膜光波导传感元件检测二甲苯气体的研究

Fe_2O_3-In_2O_3 Composite Thin Film Optical Waveguide Sensor for Xylene Gas Detection

采用溶胶-凝胶法(sol-gel)制备出氧化铁-氧化铟复合材料,利用提拉法将复合材料固定在锡掺杂玻璃光波导表面研究出能够检测二甲苯气体的Fe2O3-In2O3复合薄膜/锡掺杂玻璃光波导气敏元件。将气敏元件固定在气体检测系统中对挥发性有机气体进行检测。实验结果表明,Fe2O3-In2O3复合薄膜/锡掺杂玻璃光波导气敏元件对二甲苯气体具有较好的响应,其响应浓度范围为1×10-3～1×10-5(V/V)。在常温下该敏感元件对于浓度为1×10-5(V/V)的二甲苯蒸汽有比较明显响应,其响应和恢复时间分别为5s和20s。Fe2O3-In2O3复合薄膜/锡掺杂玻璃光波导气敏元件具有灵敏度高、响应速度快、制作工艺简单和可逆性好等特点。

This paper studied the gas sensitivity of a Fe2O3-In2O3 composite thin film/tin-diffused glass optical waveguide sensor.The sensitive element was synthesized by a sol-gel method.The sensor was fabricated by coating a Fe2O3-In2O3 thin film on the tin-doped glass optical waveguide.The optical waveguide senstive element was fixed to construct a gas sensor system to detect gaseous volatile organic compounds（VOCs）.The results showed that the Fe2O3-In2O3composite thin film/tin-diffused glass optical waveguide sensor showed high sensitivity to xylene gas at room temperature and its detection range was 1×10-3-1×10-5（volume fraction）.it responded significantly to 1×10-5（V/V）of xylene vapor and the response and recovery times were short（less than 5s and 20s,respectively）.The thin film optical sensor was fabricated simply and it had a short response time,high sensitivity,and good reversibility.