一种全新的硅微阵列陀螺仪(英文)

A Novel Silicon Micro-Gyroscope Array

介绍了一种全新的硅微阵列陀螺仪的结构设计、模态仿真、电路闭环控制、数据融合方法和相关的实验结果。基于热弹性阻尼理论的数值仿真,利用结构解耦的方法设计了硅微阵列陀螺仪的四质量块结构。利用ANSYS软件对硅微阵列陀螺仪的驱动模态和检测模态进行了仿真,仿真结果表明:硅微阵列陀螺仪共有4种不同的工作模态。根据静电力反馈原理,设计了基于数字锁相控制和数字闭环控制方法的控制电路。电路测试结构表明硅微阵列陀螺仪驱动模态的振动幅值的相对稳定性可以达到9×10-5。分析了硅微阵列陀螺仪的随机漂移特性,建立了漂移误差模型,并设计了卡尔曼滤波器以获取硅微阵列陀螺仪的随机漂移的最优估计。利用多传感器信息融合算法,硅微阵列陀螺仪的零偏稳定性可以提高10倍。

This paper presents the structure design,modal simulation,closed-loop control,data fusion,and experimental results of a novel silicon micro-gyroscope array.Based on a numerical model of thermoelastic damping,a new quad-cell structure is designed using structure-decoupled method.The driving and sensing modes are simulated using ANSYS.The simulation results show that the gyroscope array has four modal types in the driving mode and sensing mode.Digital phase-locked loop and digital closed-loop control methods based on electrostatic force feedback are adopted in control circuits.The testing results demonstrate that the relative deviation of the oscillating amplitude is 9×10-5.A new random drift model and the rate random walk model of the silicon micro-gyroscope array are analyzed.Based on the noise model,Kalman filter is built to obtain the optimal estimation of the gyroscope array ＇ s output.By the data fusion,the bias stability of the gyroscope array can be improved 10 times.