摘要
MEMS传感器工艺仿真的计算基础是体素模型,但是由于体素模型分辨率所限可能造成阶梯效应,以致体素模型的可视化效果不好。因此我们需要将体素模型转化为三角面片模型,但是通过常见的转化方法所得到的三角面片模型表面粗糙。提出了一种基于自适应均值平滑算法的三维重绘技术,对体素模型进行程度不同的平滑滤波,再利用Marching Cubes算法得到三角面片模型。经仿真实验表明通过所提的方法得到的三角面片模型表面光滑可视化效果更好。
MEMS sensor process simulation is based on voxel models.But limited by the resolution,voxel models may cause ladder effects and so poor visualization.Therefore,we need to transform voxel models to triangular facet models.However,the surface of triangular facet models from commonly used methods is rough.In this paper,a three-dimensional redrawing method based on adaptive average filtering algorithm is introduced.Voxel models are filtered to different degrees of smoothness.Then triangular facet models are created using the marching cube algorithm.Simulation results show much better visualization.
出处
《传感技术学报》
CAS
CSCD
北大核心
2013年第4期530-535,共6页
Chinese Journal of Sensors and Actuators