硼硅酸盐复相材料与金属浆料共烧匹配性研究

The Matching of Borosilicate Glass-Al_2O_3 Composite Ceramics with Metal Paste

采用流延法,制备了硼硅酸铅微晶玻璃/Al2O3复相玻璃陶瓷基片。考察了复相陶瓷与金属浆料在烧成过程中,由于异种材料收缩特性差异对CBS系LTCC材料与金属浆料共烧匹配性的影响。结果表明:850°C烧结试样,体积密度3.14g.cm-3,X、Y轴收缩率13%,Z轴收缩率17%,热膨胀系数6×10-6.K-1,热导系数为2.4W.(mK)-1,10MHz下介电常数和介电损耗分别为7.95和1.1×10-3,能够与金属电极浆料实现850°C共烧,匹配性良好,可满足LTCC基板材料的使用要求。

Borosilicate glass-Al2O3 composites ceramic substrates are prepared by tape casting. The effects of different shrinking behaviors on the matching of CaO-B203-SiO2 system with metal paste are discussed. The results show that the green tape of borosilicate glass-A1203com- posites with thickness about 110± 1μm can co-fire with Au/Ag electrode paste at 850 ℃, which has achieved excellent properties at 850℃, such as bulk density of 3.14 g · cm-3, X/Y shrinking rate of 13%, Z shrinking rate of 17%, linear thermal expansion coefficient（300 ℃） of 6× 10-6· K-1, thermal conductivity of 2.4W · （mK）-1, dielectric constant of 7.95 and di- electric loss of 1.1 × 10-3at 10 MHz. And no camber and mismatch is observed in the co-fired systems. The prepared borosilicate glass-Al2O3 composites are well suitable for LTCC applica- tion.