摘要
本文介绍了一种MEMS芯片的压力传感器的标定和补偿方法,分析了传感器的结构原理和常见补偿方式,详述了采用的标定和补偿方法,并通过实验进行了验证,证明该方法是一种简便有效的方法,能够被广泛使用。
This article focuses on the MEMS pressure sensor＇s Calibration and temperature compensation,introduces sensor＇s structure principle and compensation method.c, gets a n effective solution to temperature drift. Thissolution has been verified through experiments and been considered as an effective simple method can bewidely used.
出处
《科技风》
2013年第12期34-35,共2页
关键词
MEMS
压力传感器
温度漂移
温度补偿
MEMS
Pressuresensor
Temperaturedrift
Temperaturecompensation
