摘要
We develop a novel and convenient method to prepare large area single-layer and multi-layer graphene through surface modification with oxygen plasma.The obtained large area single-layer graphene is dozens of microns wide in the lateral dimension and characterized by optical microscopy,atomic force microscopy.Raman spectroscopy show multilayer graphene has less disorder density than single-layer graphene.X-ray photoelectron spectroscopy（XPS） analysis shows that hydroxyl groups are formed on the HOPG surface during oxygen plasma pre-treatment.Hydrogen bonds develop between hydroxyl groups on HOPG surface and silanol groups on hydroxylated SiO_2/Si substrate,which facilitate the transfer process.This study may provide a potential approach to develop graphene-based devices by using the large area lithographic printing process.
We develop a novel and convenient method to prepare large area single-layer and multi-layer graphene through surface modification with oxygen plasma.The obtained large area single-layer graphene is dozens of microns wide in the lateral dimension and characterized by optical microscopy,atomic force microscopy.Raman spectroscopy show multilayer graphene has less disorder density than single-layer graphene.X-ray photoelectron spectroscopy（XPS） analysis shows that hydroxyl groups are formed on the HOPG surface during oxygen plasma pre-treatment.Hydrogen bonds develop between hydroxyl groups on HOPG surface and silanol groups on hydroxylated SiO_2/Si substrate,which facilitate the transfer process.This study may provide a potential approach to develop graphene-based devices by using the large area lithographic printing process.
基金
Project supported by the Opening Project of Key Laboratory of Microelectronics Devices & Integrated Technology,Institute of Microelectronics, Chinese Academy of Sciences
