平面光波导生物传感器微流通道的不可逆封合

Irreversible adherence of micro-fluidic channel of bio-sensor on slab optical waveguide

提出采用不可逆封合技术来解决可逆封合的平面光波导生物传感器的微流通道在注入液体压力较大时会出现漏液的问题。分别采用等离子体法、氧化法、紫外灯照射法和紫外胶法实现了聚二甲基硅氧烷(PDMS)和绝缘材料上的硅(SOI)波导的不可逆封合。首先,采用4种实验方案分别处理PDMS和SOI波导表面,测试了经上述几种方法处理后微流通道与波导的粘合能力的强弱。然后,定量分析PDMS和SOI波导的封合效果。最后,经过实验比较得出用等离子体处理PDMS和SOI波导表面得到的不可逆封合效果最好的结论。文中也讨论了其他实验因素对粘合程度的影响。

An irreversible adherence method is proposed to bond the microfluidic channel of a waveguide biosensor to orercome the liquid leaks from the traditional reversible adherence.Several methods on irreversible adherence between Polydimethylsiloxane（PDMS） and Silicon-on-Insulator（SOI） waveguide in the micro-fluidic channel of bio-sensor are illustrated,that is,irradiation with ultraviolet light,activation surface by oxygen plasma,oxidizing surfaces into SiO2 and ultraviolet glue.Firstly,the PDMS and SOI waveguide surfaces are treated with the four methods.Secondly,the bonding capacities are tested and the adherence effect is analysed in quantity.Finally,the activation surface by oxygen plasma is selected as the most effective method for irreversible adherence and other factors probably affecting the adherent effect in the experiment are also discussed.