多自由度短行程超精密平面电机技术发展综述

Development of Multi-DOF Micro-Motion Ultra-Precision Planar Motors

多自由度短行程超精密平面电机具有高精度、高速度、高频响等优点,在半导体光刻加工、超精密测量、生物芯片技术等现代精密、超精密加工装备领域具有广阔的应用前景,近年来受到学术界的广泛关注。本文介绍了多自由度短行程超精密平面电机的研究现状,对近年来国内外用于实现超精密定位的主流结构进行了综述,总结了目前超精密平面电机的主要研究内容与关键技术,并讨论了其未来的发展趋势。

Multi-DOF micro-motion ultra-precision planar motors have many advantages such as high precision, high speed, high frequency response and so on. It has broad application prospects in modern precision, ultra-precision machining equipment domains such as semiconductor photolithography processing, ultra precise measurement, biological chip technology. In recent years, multi-DOF micro-motion ultra-precision planar motors have attracted widespread attention in academic field. In this paper, the current research status of multi-DOF micro-motion ultra-precision planar motors is introduced. The dominating structures of ultra-precision planar motors for ultra-precision positioning are presented. The main research contents and key technologies of ultra-precision planar motors are summarized. The development trend of ultra-precision planar motors is discussed.