悬臂梁压电弯曲效应研究与验证

Research and Verification of Bending Effect for a Cantilever Piezoelectric Beam

采用各向异性弹性理论和电磁理论计算压电石英悬臂梁的弯曲应力和弯曲束缚电荷密度,并利用有限元方法模拟出极化电场分布。理论分析表明,采用分割电极法在压电梁表面合理布置检测电极可测量弯曲效应。对该悬臂梁压电弯曲效应进行了实验验证,实验结果表明电极检测的电荷量与外力成线性关系,理论分析与实验结果基本一致。悬臂梁压电弯曲效应研究将为新型压电谐振器或执行器的开发奠定理论和实验基础。

By means of anisotropic elasticity and Maxwell electromagnetic theory,the bending stress and polarization charge density were calculated.The distribution of the electric field in the piezoelectric beam was simulated by the finite element method.Based on the theoretical analysis of the bound charge distribution,using the partitioned electrode method the measuring electrodes were disposed effectively on the surfaces of the piezoelectric quartz beam.A specially designed experiment was performed to validate that the polarization charge is linear with the external force,and the experimental results are agreement with the theoretical ones.Undoubtedly,the research will provide the theoretical and experimental foundation for designing a new type of quartz resonator or actuator.