可变矩形电子束曝光系统中的温度及微束流测量数据采集系统

THE DATA ACQUISITION SYSTEM FOR PRECISE TEMPERATURE AND MICRO ELECTRONIC BEAM CURRENT MEASUREMENT IN VARIABLE SHAPED ELECTRON BEAM EXPOSURE EQUIPMENT

大规模集成电路可变矩形电子束曝光机对温度、微束流等项测量提出了较高的要求。因此,我们已研制了分辨率为0.05℃的精密温度测量仪。为在变形束曝光机中实现自动温度和微束流测量,我们又研制了精密温度和微束流测量数据采集系统。实验证明,本系统的性能已达到设计要求。

It is necessary to measure the temperature and the micro electronic beamcurrent for the variable shaped electron beam exposure equipment precisely.We have designed the precise temperature measuring instrument with aresolution of 0.05℃ For the realization of the automatic temperature andmicro beam current measurement in the variable shaped electron beam exposureequipment,a data acquisition system for precise temperature and microelectronic beam current measuring unit has been designed and constructed.Experiments show that this system has a good performance as desired.