一种面阵CCD的筛选测试方法

Screening and Testing Method for Area CCD

为从工业级面阵CCD芯片中筛选出满足航天高可靠性和稳定性应用要求的器件,提出了一种面阵CCD的板级筛选测试方法,设计了相应筛选测试系统。采用老炼前测试参数、老炼过程中检测感光性能、老炼后测试参数及同批次器件抽样进行长寿命实验的四重筛选过程剔除不合格器件;通过测试CCD组成的相机来进行其参数的判定,利用暗室环境下的积分球、导轨等进行亮场和暗场参数测试,提出利用积分球、靶标、平行光管和六自由度调整系统进行调制传递函数最大值的自动测试。筛选测试后的器件已经应用于工程实践,并通过了一系列实验考核,结果表明,采用此方法筛选出的面阵CCD芯片满足航天应用要求。

In order to screen high reliability and stability area CCD from industrial class devices for the aerospace application, a board level screening and test method for area CCD is put forward and a corresponding screening and test system is designed. To find out unqualified devices, four steps are carried out, consisting of parameters test before aging process, photosensitive property test during the aging process, parameters test afer aging process and long-life experiment for the same batch sampling devices; the judgment of area CCD parameters is made via testing the camera which contains the area CCD; the integrating sphere and guideway are used to test the the bright field and dark field parameters in the darkroom environment. The integrating sphere, the target, the collimator and the six degrees of freedom adjusting system are used to modulation transfer function （MTF） maximum value test. The screening and test of area CCD have been used in engineering practice and passed through a series of test evaluation. The test evaluation results show that the screening and test meet the aerospace applications requirements.