光学加工中真空夹具设计及分析

Design and analysis of vacuum fixture in optical processing

为了在光学加工中快速、可靠地装夹光学元件,设计了真空夹具,对该真空夹具引起光学元件变形量进行了分析。首先,根据光学加工对夹具的要求,应用手动静压快速夹头以及传统真空吸盘结构,设计了真空夹具;接着,对真空夹具引起光学元件变形量进行了仿真分析,并根据分析结果改进了真空夹具结构;最后,针对改进后的真空夹具进行了仿真验证。仿真结果表明:有防护层的真空夹具引起光学元件表面最大变形量在0.1μm～0.32μm之间,是没有防护层的真空夹具引起光学元件表面最大变形量的1/14。该种真空夹具可以应用于高精度光学加工中。

A vacuum fixture was designed to clamp the optical lens lastly and reliably in optical processing. And the deformation of the optical lens caused by the vacuum fixture was analyzed. First, the manual-static pressure-fast chuck and the traditional vacuum-cupule structure were used to design the vacuum fixture, based on the requirement of optical processing. Further, the deformation of the lens caused by the vacuum fixture was analyzed based on simulation. And, modification was done to optimize the structure of the vacuum fixture. Finally, new simulation was performed to verify the new structure of the vacuum fixture. The simulation results show that the largest deformation on the surface of the lens, caused by vacuum fixture with protective layer, range from 0.1μm to 0.32μm, which is 1/14 times of the deformation without protective layer. This vacuum fixture can be applied in high-precision optical processing.