新型电容传感器结构的设计

The Structure Design of a New Capacitance Sensor

提出了一种采用变间距差动式电容结构设计的电容压力传感器 ,并详细讨论了弹性体厚度的理论计算和版图的设计 .此种传感器是用来测量近海海水深度和浪高 ,并由此得到潮汐的变化的 .这种差动式结构是利用压力作用在可动电极上 ,在微机械加工的过程中 ,采用某种连接 ,大大提高了传感器的灵敏度和测量精度 .

A new differential capacitance stress s en sor was designed in this paper,the theoretical calculation and the layout design of the thickness of elastic element were discussed in detail.This kind of senso r can be used to measure the deep of water and the height of wave,and to draw th e curve line of tide.Using this structure,in which the stress puts on the moving electrode,can reach high precision in experimental measurement.